Wafer ID optical sorting system
US6265684A · kind A · utility
9Cited by
6References
10Claims
0Family size
Assignees
Inventor
Key dates
| Filing date | Oct 28, 1999 |
| Grant date | Jul 24, 2001 |
| Priority date | — |
| Expiry date | Oct 28, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB07C5/3412
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A wafer ID optical sorting system includes an auto-ID reader, a manual-ID reader and a conveying device, operation of which units is controlled by a monitoring system. The auto-ID reader, connected to the monitoring system, can automatically read and identify an ID and allows the ID to be displayed on the monitoring system. The manual-ID reader, connected to the monitoring system, can fetch the ID image and allows it to be displayed on the monitoring system. The conveying device, connected to the monitoring system, can move the auto-ID reader and the manual-ID reader.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.