Micro adjustable illumination aperture
US6268908A · kind A · utility
8Cited by
19References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 30, 1999 |
| Grant date | Jul 31, 2001 |
| Priority date | — |
| Expiry date | Aug 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70116
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The distribution of ultraviolet light irradiated from an illumination source to optical elements of a projection exposure device is varied by an illumination aperture. The illumination aperture is formed with a plurality of openings which may be opened or closed independently to the passage of irradiating light. The size and shape of the opening formed by the plurality of openings of the illumination aperture is determined according to the particular image to be projected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.