Inventor · Shelburne, VT, US

Orest Bula

22Patents
11h-index
21Co-inventors
71Inventor score

Filing activity: May 6, 1991 → Jun 27, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6425112B1 Auto correction of error checked simulated printed images Physics 220 Expired
US6016357A Feedback method to repair phase shift masks Physics 114 Expired
US6373975B1 Error checking of simulated printed images with process window effects included Physics 54 Expired
US6238850A Method of forming sharp corners in a photoresist layer Physics 38 Expired
US5317573A Apparatus and method for real time data error capture and compression redundancy analysis Physics 29 Expired
US6395438B1 Method of etch bias proximity correction Physics 24 Expired
US6214494A Serif mask design methodology based on enhancing high spatial frequency contribution for improved printability Physics 20 Expired
US6383719B1 Process for enhanced lithographic imaging Physics 16 Expired
US6627361B2 Assist features for contact hole mask patterns Physics 13 Expired
US6539321B2 Method for edge bias correction of topography-induced linewidth variation Physics 11 Expired
US6704695B1 Interactive optical proximity correction design method Physics 11 Expired
US6268908A Micro adjustable illumination aperture Physics 8 Expired
US7257247B2 Mask defect analysis system Physics 7 Expired
US6261724A Method of modifying a microchip layout data set to generate a predicted mask printed data set Physics 7 Expired
US6577406B2 Structure for lithographic focus control features Physics 6 Expired
US6429469B1 Optical Proximity Correction Structures Having Decoupling Capacitors Electricity 4 Expired
US6258490A Transmission control mask utilized to reduce foreshortening effects Physics 3 Expired
US5093584A Self calibrating timing circuit Electricity 2 Expired
US6458493B2 Method to control nested to isolated line printing Physics 2 Expired
US7492940B2 Mask defect analysis system Physics 1 Active
US6667136B2 Method to control nested to isolated line printing Physics 1 Expired
US7492941B2 Mask defect analysis system Physics 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.