Patent · US Expired

Process for recycling a substrate from an integrated circuit package

US6271048A · kind A · utility

7Cited by
5References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 20, 2000
Grant dateAug 7, 2001
Priority date
Expiry dateOct 20, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19043
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit package is processed by a grinding step, a dissolving step, and a disintegrating step. The grinding step grinds an IC-chip completely off of a substrate, and it also grinds a first portion of a filler layer and a first portion of a set of solder balls which attach the IC-chip to the substrate. This leaves a partial filler layer and partial solder balls on the substrate. The dissolving step dissolves the partial filler layer off of the substrate after the grinding step; and the disintegration step disintegrates at least part of each partial solder ball by subjecting the partial solder balls on the substrate to ultrasonic vibration after the dissolving step. These steps leave the substrate with small solder mounds that can be easily attached to another IC-chip with another set of solder balls.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.