Method of protecting tungsten plug from corroding
US6277742A · kind A · utility
5Cited by
2References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 29, 1999 |
| Grant date | Aug 21, 2001 |
| Priority date | — |
| Expiry date | Jun 29, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of protecting a tungsten plug from corroding. After a tungsten plug is formed in a substrate, a wire is formed on the substrate to couple with the tungsten plug. The substrate is dipped into an electrolyte solution. The electrolyte solution is acid or alkaline enough to discharge charges accumulated on the wire. Then, a wet cleaning process is performed to remove polymer formed on the wire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.