Method for precise temperature sensing and control of semiconductor structures
US6293698A · kind A · utility
10Cited by
4References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 4, 1995 |
| Grant date | Sep 25, 2001 |
| Priority date | — |
| Expiry date | Oct 4, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K13/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Precise sensing and controlling of temperature during in-situ testing of a structure used in an integrated circuit by fabricating or placing a heat source element adjacent to the structure and by fabricating or placing a temperature sensing element adjacent to the structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.