Method of predicting the curvature radius of the microlens
US6304387A · kind A · utility
1Cited by
1References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 19, 2000 |
| Grant date | Oct 16, 2001 |
| Priority date | — |
| Expiry date | May 19, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB29D11/00365
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
The invention proposes a method of predicting the curvature radius of the microlens. By adjusting a spin speed of spin coating and exposure energy during a photolithography step, a volume of the patterned microlens material layer is controlled. Then a lens-forming step is performed to transform the patterned microlens material layer into a microlens. After measuring a diameter of the microlens, the volume of the microlens material layer is multiplied by a contraction coefficient to calculate a volume of the microlens. Then the diameter and the volume of the microlens are used to calculate a curvature radius.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.