Control system and method for providing variable ramp rate operation of a thermal cycling system
US6313441A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 2, 1999 |
| Grant date | Nov 6, 2001 |
| Priority date | — |
| Expiry date | Nov 2, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF25B21/04
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A control system and method for variable ramp rate operation of a heater or integrated heating and cooling plate is provided. The control system obtains a calibration signal for a specific thermal cycling profile and for a specific heater, by exposing a calibration wafer having temperature sensors coupled thereto to a predetermined thermal cycling profile. During the calibration process, the temperature sensed by one or more sensors positioned on the heater, or on a thermally conductive plate coupled to the heater is recorded, as is the signal output to the heater. Preferably the position of the wafer relative to the heating mechanism, and the flow of cooling fluid to the heating mechanism are also recorded as part of the calibration signal. When the calibration signal is executed during production processing, the heating mechanism, fluid flow and/or lift pin position can be adjusted based on feedback from the temperature sensors positioned on the heater or on the conductive plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.