Douglas W. Young
35Patents
15h-index
36Co-inventors
77Inventor score
Filing activity: Apr 26, 1996 → Feb 2, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5762536A | Sensors for a linear polisher | Performing Operations; Transporting | 115 | Expired |
| US5722877A | Technique for improving within-wafer non-uniformity of material removal for performing CMP | Performing Operations; Transporting | 109 | Expired |
| US5800248A | Control of chemical-mechanical polishing rate across a substrate surface | Performing Operations; Transporting | 101 | Expired |
| US5916012A | Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher | Performing Operations; Transporting | 84 | Expired |
| US6630059B1 | Workpeice proximity plating apparatus | Electricity | 63 | Expired |
| US5871390A | Method and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishing | Performing Operations; Transporting | 59 | Expired |
| US6359264B1 | Thermal cycling module | Electricity | 57 | Expired |
| US6352623B1 | Vertically configured chamber used for multiple processes | Emerging Cross-Sectional Technologies | 56 | Expired |
| US6278089A | Heater for use in substrate processing | Electricity | 47 | Expired |
| US6666959B2 | Semiconductor workpiece proximity plating methods and apparatus | Electricity | 41 | Expired |
| US6612915B1 | Work piece carrier head for plating and polishing | Chemistry; Metallurgy | 36 | Expired |
| US6908374B2 | Chemical mechanical polishing endpoint detection | Performing Operations; Transporting | 31 | Expired |
| US6313441A | Control system and method for providing variable ramp rate operation of a thermal cycling system | Mechanical Engineering; Lighting; Heating | 27 | Expired |
| US6478936B1 | Anode assembly for plating and planarizing a conductive layer | Chemistry; Metallurgy | 23 | Expired |
| US6857947B2 | Advanced chemical mechanical polishing system with smart endpoint detection | Performing Operations; Transporting | 22 | Expired |
| USD490346S1 | Motorcycle carburetor cover | General | 13 | Expired |
| US6468139B1 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Performing Operations; Transporting | 11 | Expired |
| USD489651S1 | Motorcycle carburetor cover | General | 9 | Expired |
| US6464571B2 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Performing Operations; Transporting | 8 | Expired |
| US6425812B1 | Polishing head for chemical mechanical polishing using linear planarization technology | Performing Operations; Transporting | 6 | Expired |
| US6604988B2 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Performing Operations; Transporting | 5 | Expired |
| US6589105B2 | Pad tensioning method and system in a bi-directional linear polisher | Performing Operations; Transporting | 4 | Expired |
| US6634935B2 | Single drive system for a bi-directional linear chemical mechanical polishing apparatus | Performing Operations; Transporting | 4 | Expired |
| US8016007B2 | Method and apparatus for stringing thin film solar cells | Emerging Cross-Sectional Technologies | 4 | Active |
| US6076668A | Golf head cover organizer | Human Necessities | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.