Patent · US Expired

Semiconductor device with partial passivation layer

US6313538A · kind A · utility

1Cited by
4References
9Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 21, 2000
Grant dateNov 6, 2001
Priority date
Expiry dateJan 21, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a first dielectric layer, a plurality of conductive interconnections formed in the first dielectric layer, a patterned passivation layer formed above the conductive interconnections, and a second dielectric layer formed above and in contact with the passivation layer and the first dielectric layer. A method for forming a semiconductor device includes providing a base layer, forming a first dielectric layer over the base layer, forming a plurality of conductive interconnections in the first dielectric layer, forming a patterned passivation layer above the conductive interconnections, and forming a second dielectric layer above and in contact with the passivation layer and the first dielectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.