Patent · US Expired

Structuring method

US6315913A · kind A · utility

5Cited by

11References

37Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Manfred Engelhardt · Feldkirchen-Westerham, DE
Volker Weinrich · Paris, FR

Key dates

Filing date	Sep 3, 1998
Grant date	Nov 13, 2001
Priority date	—
Expiry date	Sep 3, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P70/50
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method for structuring at least one layer to be structured. Initially, a mask is applied to the layer and the layer is structured using the mask. After the structuring step, the mask is then removed, while leaving behind redepositions of the material of the layer. The redepositions of the material of the layer are then removed by sound action.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.