Manfred Engelhardt
70Patents
8h-index
75Co-inventors
81Inventor score
Filing activity: Sep 4, 1979 → Jul 9, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6030900A | Process for generating a space in a structure | Electricity | 327 | Expired |
| US9627287B2 | Thinning in package using separation structure as stop | Electricity | 148 | Active |
| US6387773B1 | Method for fabricating trenches having hallows along the trenches side wall for storage capacitors of DRAM semiconductor memories | Electricity | 11 | Expired |
| US4283849A | Cutting unit for a dry-shaving apparatus | Performing Operations; Transporting | 10 | Expired |
| US4275497A | Shaving apparatus | Performing Operations; Transporting | 10 | Expired |
| US5118383A | Method for producing trench structures in silicon substrates for VLSI semiconductor circuits | Electricity | 9 | Expired |
| US7321097B2 | Electronic component comprising an electrically conductive connection consisting of carbon nanotubes and a method for producing the same | Electricity | 9 | Expired |
| US6454956B1 | Structuring method | Emerging Cross-Sectional Technologies | 9 | Expired |
| US8093637B2 | MIM capacitor and associated production method | Electricity | 7 | Active |
| US6296777A | Structuring process | Electricity | 7 | Expired |
| US5990536A | Integrated circuit arrangement having at least two mutually insulated components, and method for its production | Electricity | 6 | Expired |
| US5332468A | Method for structuring a layer using a ring electrode and multiple RF power sources | Electricity | 6 | Expired |
| US6210595A | Method for producing structures having a high aspect ratio and structure having a high aspect ratio | Electricity | 6 | Expired |
| US6888244B2 | Interconnect arrangement and method for fabricating an interconnect arrangement | Electricity | 6 | Expired |
| US6864175B2 | Method for fabricating integrated circuit arrangements, and associated circuit arrangements, in particular tunnel contact elements | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8338317B2 | Method for processing a semiconductor wafer or die, and particle deposition device | Electricity | 5 | Active |
| US8462358B2 | Device for detecting movement and forces | Physics | 5 | Active |
| US6315913A | Structuring method | Emerging Cross-Sectional Technologies | 5 | Expired |
| US10032670B2 | Plasma dicing of silicon carbide | Electricity | 4 | Active |
| US7045070B1 | Method of producing an electrode configuration and method of electrically contacting the electrode configuration | Electricity | 4 | Expired |
| US6316802A | Easy to manufacture integrated semiconductor memory configuration with platinum electrodes | Electricity | 3 | Expired |
| US9219011B2 | Separation of chips on a substrate | Electricity | 2 | Active |
| US8361884B2 | Plasma dicing and semiconductor devices formed thereof | Electricity | 2 | Active |
| US6730562B2 | Method of patterning ferroelectric layers | Electricity | 2 | Expired |
| US9275916B2 | Removable indicator structure in electronic chips of a common substrate for process adjustment | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.