Patent · US Expired

Movable ion source assembly

US6331713A · kind A · utility

12Cited by

5References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Theodore H. Smick · Essex, US
Marvin Farley · Ipswich, US
Geoffrey Ryding · Attleboro, US
Shu Satoh · Byfield, US
Peter Rose · Heidenheim, DE

Key dates

Filing date	Oct 6, 1999
Grant date	Dec 18, 2001
Priority date	—
Expiry date	Oct 6, 2019

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/08
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An ion source assembly 10 is disclosed, the assembly comprising a source sub assembly having an ion source 20, an extraction electrode 40 and an electrically insulating high voltage bushing 60 to support the extraction electrode 40 relative to the ion source 20. The ion source assembly further includes a chamber 70 having an exit aperture to allow egress of ions to an ion implanter. The chamber 70 encloses one or more further electrodes 80,90. The source sub assembly is mounted to the chamber 70 via a hinge 150. This allows ready access to the inner walls of the chamber 70, which in turn allows easier maintenance and cleaning of the further electrodes 80,90 as well as the inner walls of the chamber 70. Preferably, a liner 160 is employed on the inner walls of the chamber 70.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.