Marvin Farley
41Patents
15h-index
44Co-inventors
81Inventor score
Filing activity: Jun 27, 1984 → May 26, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8227768B2 | Low-inertia multi-axis multi-directional mechanically scanned ion implantation system | Electricity | 75 | Active |
| US4804837A | Ion implantation surface charge control method and apparatus | Electricity | 71 | Expired |
| US6271529A | Ion implantation with charge neutralization | Electricity | 71 | Expired |
| US4539217A | Dose control method | Electricity | 62 | Expired |
| US6437351B1 | Method and apparatus for controlling a workpiece in a vacuum chamber | Electricity | 61 | Expired |
| US5898179A | Method and apparatus for controlling a workpiece in a vacuum chamber | Electricity | 56 | Expired |
| US4587433A | Dose control apparatus | Electricity | 48 | Expired |
| US6248642A | SIMOX using controlled water vapor for oxygen implants | Electricity | 47 | Expired |
| US6515288B1 | Vacuum bearing structure and a method of supporting a movable member | Electricity | 36 | Expired |
| US6163033A | Method and apparatus for controlling a workpiece in a vacuum chamber | Electricity | 33 | Expired |
| US4804852A | Treating work pieces with electro-magnetically scanned ion beams | Electricity | 32 | Expired |
| US4675530A | Charge density detector for beam implantation | Electricity | 27 | Expired |
| US6297510A | Ion implant dose control | Electricity | 23 | Expired |
| US6501078B1 | Ion extraction assembly | Electricity | 21 | Expired |
| US6555832B1 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Electricity | 16 | Expired |
| US6870170B1 | Ion implant dose control | Electricity | 14 | Expired |
| US6908836B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 12 | Expired |
| US6331713A | Movable ion source assembly | Electricity | 12 | Expired |
| US6956223B2 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Electricity | 9 | Expired |
| US7479644B2 | Ion beam diagnostics | Electricity | 7 | Active |
| US6878946B2 | Indirectly heated button cathode for an ion source | Electricity | 7 | Expired |
| US7049210B2 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 6 | Expired |
| US6274875A | Fluid bearing vacuum seal assembly | Emerging Cross-Sectional Technologies | 5 | Expired |
| US6268609A | Apparatus and method for reducing heating of a workpiece in ion implantation | Electricity | 4 | Expired |
| US7282427B1 | Method of implanting a substrate and an ion implanter for performing the method | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.