Air feeder provided with by-pass bypassing cooling section, substrate processing apparatus including the same, and air supply method
US6338474B1 · kind B1 · utility
5Cited by
14References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 9, 2000 |
| Grant date | Jan 15, 2002 |
| Priority date | — |
| Expiry date | Feb 9, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In an air feeder for supplying air with a predetermined temperature and humidity into a cup in a resist coating unit provided in a coating and developing system, a cooling section, a by-pass, a heating section, a humidifying section, and a blower are provided. 55% of introduced air is cooled in the cooling section, 45% of the introduced air passes through the by-pass, and mixed air of the cooled air and the air from the by-pass is heated in the heating section and humidified in the humidifying section, thereby enabling energy-saving and space-saving temperature and humidity control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.