MOCVD of SBT using toluene based solvent system for precursor delivery
US6340386B1 · kind B1 · utility
12Cited by
42References
22Claims
0Family size
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Key dates
| Filing date | Nov 15, 1999 |
| Grant date | Jan 22, 2002 |
| Priority date | — |
| Expiry date | Nov 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S427/101
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A solvent composition useful for liquid delivery MOCVD, comprising toluene and a Lewis base, wherein toluene is present at a concentration of from about 75% to about 98% by volume, based on the total volume of toluene and the Lewis base. Such solvent composition is usefully employed to dissolve or suspend precursors therein for liquid delivery MOCVD, e.g., MOCVD of ferroelectric material films such as SBT.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.