Contactor and production method for contractor
US6344752B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 12, 2000 |
| Grant date | Feb 5, 2002 |
| Priority date | — |
| Expiry date | Apr 12, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06716
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A conventional probe card is very complex in a support structure of probe terminals and it has been difficult to change an array of the probe terminals correspondingly to various arrays of electrode pads of an object to be checked. A contactor (1) of the present invention simultaneously sets its probe terminals in contact with a plurality of electrode pads of an object to be checked and electrical checking of the object is made once or a plurality of times. It has a plurality of first electrodes (3) arranged on a first substrate (silicon substrate) (2) and probe terminals (4) respectively provided on these electrodes (3). The probe terminal (4) has a conductive support (7) provided on the first electrode, elastic support plate (8) whose one end is fixed to the upper end of the conductive support column (7), and probe terminal (bump) 9 fixed to the free end portion of the elastic support plate (8).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.