Junichi Hagihara
21Patents
7h-index
18Co-inventors
66Inventor score
Filing activity: Jul 31, 1995 → Aug 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5825192A | Probe card device used in probing apparatus | Physics | 53 | Expired |
| US6344752B1 | Contactor and production method for contractor | Physics | 46 | Expired |
| US5708222A | Inspection apparatus, transportation apparatus, and temperature control apparatus | Emerging Cross-Sectional Technologies | 25 | Expired |
| US7091733B2 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Physics | 17 | Expired |
| US6590381B1 | Contactor holding mechanism and automatic change mechanism for contactor | Physics | 11 | Expired |
| US6438831B1 | Method of manufacturing an interconnector | Emerging Cross-Sectional Technologies | 10 | Expired |
| US8167521B2 | Substrate transfer apparatus and vertical heat processing apparatus | Electricity | 9 | Active |
| US7981217B2 | Vertical heat treatment apparatus and method of transferring substrates to be processed | Electricity | 6 | Active |
| US7242206B2 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Physics | 3 | Expired |
| US7777511B2 | Inspection apparatus having a capacitive pressure sensor between the mounting body and the support body | Physics | 3 | Active |
| US7791362B2 | Inspection apparatus | Physics | 2 | Active |
| US9671459B2 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus | Electricity | 2 | Active |
| USRE41515E1 | Contactor and production method for contactor | General | 1 | Expired |
| US8456186B2 | Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method | Physics | 1 | Active |
| US11567123B2 | Wafer inspection system | Electricity | 0 | Active |
| US10753972B2 | Wafer inspection system, wafer inspection apparatus and prober | Electricity | 0 | Active |
| US7859283B2 | Probe apparatus, probing method, and storage medium | Physics | 0 | Active |
| US11061071B2 | Wafer inspection system, wafer inspection apparatus and prober | Electricity | 0 | Active |
| US11762012B2 | Wafer inspection system | Electricity | 0 | Active |
| US12117485B2 | Wafer inspection system | Electricity | 0 | Active |
| US10976364B2 | Test head and wafer inspection apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.