Patent · US Expired

NROM cell with self-aligned programming and erasure areas

US6348711B1 · kind B1 · utility

143Cited by
14References
4Claims
0Family size

Assignee

Inventor

Key dates

Filing dateOct 6, 1999
Grant dateFeb 19, 2002
Priority date
Expiry dateOct 6, 2019

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/26586
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A nitride programmable read only memory (NROM) cell has an oxide-nitride-oxide layer over at least a channel and a pocket implant self-aligned to at least one bit line junction. The cell also includes at least one area of hot electron injection within the ONO layer and over the pocket implant and at least one area of hot hole injection generally self-aligned to the area of hot electron injection.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.