Linear drive system for use in a plasma processing system
US6350317B1 · kind B1 · utility
51Cited by
17References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1999 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Dec 30, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32568
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A linear drive assembly for moving a body associated with processing a substrate is disclosed. The linear drive assembly includes a first gear and a second gear, which is operatively engaged with the first gear. The linear drive assembly further includes a positioning member having a first portion and a second portion. The first portion is movably coupled to the second gear in a linear direction, and the second portion is fixed to a component associated with processing a substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.