Inventor · Dalton-in-Furness, GB

Keith Dawson

11Patents
5h-index
12Co-inventors
63Inventor score

Filing activity: Jan 11, 1995 → Apr 1, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US6350317B1 Linear drive system for use in a plasma processing system Electricity 51 Expired
US5609720A Thermal control of semiconductor wafer during reactive ion etching Electricity 46 Expired
US5942074A Single-piece gas director for plasma reactors Electricity 21 Expired
US6863784B2 Linear drive system for use in a plasma processing system Electricity 11 Expired
US6669811B2 Linear drive system for use in a plasma processing system Electricity 9 Expired
US5534062A Oil reservoir Physics 3 Expired
US8726784B2 Field gun aim Mechanical Engineering; Lighting; Heating 1 Active
US6536777B2 Sealing techniques suitable for different geometries and constrained spaces Emerging Cross-Sectional Technologies 1 Expired
US8317450B2 Tactile wafer lifter and methods for operating the same Emerging Cross-Sectional Technologies 1 Active
US8657556B2 Tactile wafer lifter and methods for operating the same Emerging Cross-Sectional Technologies 0 Active
USD907882S1 Counterbalance forklift truck General 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.