Micro-environment reactor for processing a workpiece
US6350319B1 · kind B1 · utility
27Cited by
36References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1998 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Mar 13, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for processing a workpiece in a micro-environment is set forth. The apparatus includes a rotor motor and a workpiece housing. The workpiece housing is connected to be rotated by the rotor motor. The workpiece housing further defines a substantially closed processing chamber therein in which one or more processing fluids are distributed across at least one face of the workpiece by centripetal acceleration generated during rotation of the housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.