Polishing apparatus including attitude controller for turntable and/or wafer carrier
US6354907B1 · kind B1 · utility
31Cited by
3References
26Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 10, 2000 |
| Grant date | Mar 12, 2002 |
| Priority date | — |
| Expiry date | Mar 10, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B49/10
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is provided a polishing apparatus comprising an attitude controller for controlling an attitude or orientation of a turntable having a polishing surface and/or a carrier for holding an article to be polished in a sliding contact relation with the polishing surface. The turntable and carrier are connected to their drive shafts through universal joints. The attitude controllers control angles of tilting of the turntable and the carrier relative to their drive shafts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.