Probing card
US6359455B1 · kind B1 · utility
37Cited by
4References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 23, 2000 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Feb 23, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R3/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probing card is disclosed which checks the electrical characteristic of a plurality of electrical elements (for example, IC chips) by contacting probes with electrode pads of the IC chips formed on an object (for example, a wafer) to be checked. The probe has a prismatic projection provided on a substrate, a spacer fixed to a top end face of the prismatic projection, a volute-like plate having one end fixed to the spacer and having an elasticity and a probe pin fixed to the other end of the volute-like plate. The other end side of the volute-like plate is formed as a free end.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.