Method and apparatus for removing processing liquid from a processing liquid delivery line
US6375753B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2001 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Jul 18, 2021 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/4273
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method and apparatus for desorbing processing liquid from a processing liquid delivery line is provided. Non-thermal energy, such as ultrasonic energy or electromagnetic energy, is applied to a processing liquid delivery line. The non-thermal energy may be applied directly to the processing liquid delivery line, or may be applied indirectly via a conducting medium which distributes the energy along the length of the processing liquid delivery line. When non-thermal energy in the form of electromagnetic energy is employed, the frequency of the electromagnetic energy is adjusted to match the vibrational frequency of the absorbed molecules of processing liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.