Automatic defect classification comparator die selection system
US6377898B1 · kind B1 · utility
30Cited by
15References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 1999 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Apr 19, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method of analyzing and classifying defects on semiconductor wafers during a semiconductor manufacturing process using a comparator die selector system wherein an automatic defect classification review tool compares defects on a die location with an identical location on an identical die. The automatic defect classification review tool locates identical die with information from the comparator die selector system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.