Methods for preparing ruthenium metal films
US6380080B2 · kind B2 · utility
41Cited by
20References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 8, 2000 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Mar 8, 2020 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention provides methods for the preparation of ruthenium metal films from liquid ruthenium complexes of the formula (diene)Ru(CO)3, wherein “diene” refers to linear, branched, or cyclic dienes, bicyclic dienes, tricyclic dienes, fluorinated derivatives thereof, combinations thereof, or derivatives thereof additionally containing heteroatoms such as halide, Si, S, Se, P, As, N, or O, in the presence of an oxidizing gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.