Focusing assembly and method for a charged particle beam column
US6380546B1 · kind B1 · utility
21Cited by
7References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 1, 2000 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Jan 1, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3175
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Method and assembly are presented for focusing a charged particle beam while directing it onto a specimen. The assembly comprises a lens arrangement producing a focusing field and first and second deflectors. The first deflector is accommodated within the focusing field, and the second deflector is accommodated downstream of the first deflector with respect to the direction of beam propagation, and is operable in a predetermined manner with respect to the operational mode of the first deflector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.