Production method for integrated angular speed sensor device

US6387725B1 · kind B1 · utility

Assignee

• STMicroelectronics SA

Inventors

• Paolo Ferrari · Gallarate, IT
• Benedetto Vigna · Pietrapertosa, IT
• Mario Foroni · Valeggio sul Mincio, IT
• Marco Ferrera · Vimercate, IT
• Pietro Montanini · Milano, IT

Key dates

• Filing date: Feb 22, 2001
• Grant date: May 14, 2002
• Expiry date: Feb 22, 2021

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/764
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An angular speed sensor comprises a pair of mobile masses which are formed in an epitaxial layer and are anchored to one another and to the remainder of the device by anchorage elements. The mobile masses are symmetrical with one another, and have first mobile excitation electrodes which are intercalated with respective first fixed excitation electrodes and second mobile detection electrodes which are intercalated with second fixed detection electrodes. The first mobile and fixed excitation electrodes extend in a first direction and the second mobile and fixed detection electrodes extend in a second direction which is perpendicular to the first direction and is disposed on a single plane parallel to the surface of the device.