Method and apparatus for simulating a surface photo-voltage in a substrate
US6388455B1 · kind B1 · utility
43Cited by
17References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 13, 2000 |
| Grant date | May 14, 2002 |
| Priority date | — |
| Expiry date | Jan 13, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/308
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a method and apparatus for simulating a surface photo-voltage, more particularly with a photodiode on a process sized disk for calibrating surface photo-voltage measurement devices. The device for simulating a surface photo-voltage includes the photodiode, the disk, a resistor, and may further include an operational amplifier. The apparatus for simulating a surface photo-voltage of the current invention facilitates calibration of surface photo-voltage measurement devices by using a process sized disk to fit directly on a surface photo-voltage measurement chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.