Method and apparatus for cleaning treatment
US6391110B1 · kind B1 · utility
7Cited by
24References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2000 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Oct 12, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus for a treatment is provided, the apparatus comprising a vessel for recovering a treatment liquid flowing out or flying out when the object is treated, cleaning means for cleaning an inner wall surface of the vessel by supplying a cleaning liquid into the vessel, and a circulation system for recovering a discharged liquid discharged from the vessel when the inner wall surface of the vessel is cleaned by the cleaning means and supplying the recovered liquid to the cleaning means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.