Erosion resistant gas energizer
US6391146B1 · kind B1 · utility
23Cited by
45References
50Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2000 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Apr 11, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/70
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for reducing hazardous gases exhausted from a process chamber 25 includes an effluent gas treatment system 200 with a gas energizing reactor 210 with an erosion resistant inner surface 280. Optionally, an additive gas source 230 may be provided to introduce additive gas into the gas energizing reactor 210. In one embodiment, the inner surface comprises a fluorine-containing compound. In another embodiment, the inner surface comprises an oxide and a stabilizing agent.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.