Ashish Bhatnagar
27Patents
7h-index
36Co-inventors
69Inventor score
Filing activity: Feb 17, 2000 → Jul 12, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6367412B1 | Porous ceramic liner for a plasma source | Emerging Cross-Sectional Technologies | 82 | Expired |
| US6391146B1 | Erosion resistant gas energizer | Performing Operations; Transporting | 23 | Expired |
| US8617672B2 | Localized surface annealing of components for substrate processing chambers | Emerging Cross-Sectional Technologies | 18 | Active |
| US7732056B2 | Corrosion-resistant aluminum component having multi-layer coating | Chemistry; Metallurgy | 18 | Expired |
| US6673323B1 | Treatment of hazardous gases in effluent | Chemistry; Metallurgy | 15 | Expired |
| US6824748B2 | Heated catalytic treatment of an effluent gas from a substrate fabrication process | Emerging Cross-Sectional Technologies | 10 | Expired |
| US8225927B2 | Method to substantially enhance shelf life of hygroscopic components and to improve nano-manufacturing process tool availablity | Electricity | 8 | Active |
| US8475231B2 | Carrier head membrane | Performing Operations; Transporting | 7 | Active |
| US7045020B2 | Cleaning a component of a process chamber | Emerging Cross-Sectional Technologies | 7 | Expired |
| US9227297B2 | Retaining ring with attachable segments | Performing Operations; Transporting | 7 | Active |
| US8662957B2 | Leak proof pad for CMP endpoint detection | Performing Operations; Transporting | 5 | Active |
| US8722389B1 | Method and system of culturing an algal mat | Chemistry; Metallurgy | 4 | Active |
| US9481608B2 | Surface annealing of components for substrate processing chambers | Emerging Cross-Sectional Technologies | 4 | Active |
| US10160093B2 | Carrier head membrane roughness to control polishing rate | Electricity | 4 | Active |
| US8464594B2 | Measuring flow properties of multiple gas nozzles of a gas distributor | Physics | 4 | Active |
| US9627231B2 | Methods for bonding substrates | Emerging Cross-Sectional Technologies | 4 | Active |
| US8740206B2 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Electricity | 3 | Active |
| US11007619B2 | Carrier head membrane with regions of different roughness | Electricity | 2 | Active |
| US10168229B2 | EMI/RF shielding of thermocouples | Physics | 1 | Active |
| US11738421B2 | Method of making carrier head membrane with regions of different roughness | Electricity | 1 | Active |
| US10177014B2 | Thermal radiation barrier for substrate processing chamber components | Electricity | 1 | Active |
| US8043433B2 | High efficiency electro-static chucks for semiconductor wafer processing | Emerging Cross-Sectional Technologies | 0 | Active |
| US9823133B2 | EMI/RF shielding of thermocouples | Physics | 0 | Active |
| US9960019B2 | Life enhancement of ring assembly in semiconductor manufacturing chambers | Electricity | 0 | Active |
| US9168631B2 | Two-part retaining ring with interlock features | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.