High NA imaging system
US6392793B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 4, 2000 |
| Grant date | May 21, 2002 |
| Priority date | — |
| Expiry date | Jan 4, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for imaging is disclosed herein. The system has a numerical aperture (NA) preferably greater than 0.9, but greater than 0.65, and uses unique illumination entrances to collect reflected, diffracted, and scattered light over a range of angles. The system includes a catadioptric group, focusing optics group, and tube lens group. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric group at any angle from 0 to 85 degrees from vertical. The high NA catadioptric system can also have a relayed pupil plane, used to select different imaging modes, providing simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.