Bin-Ming Benjamin Tsai
56Patents
19h-index
40Co-inventors
84Inventor score
Filing activity: Dec 3, 1987 → Jul 30, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6771806B1 | Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices | Physics | 230 | Expired |
| US5822055A | Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection | Physics | 170 | Expired |
| US4845558A | Method and apparatus for detecting defects in repeated microminiature patterns | Physics | 164 | Expired |
| US5999310A | Ultra-broadband UV microscope imaging system with wide range zoom capability | Physics | 159 | Expired |
| US5537669A | Inspection method and apparatus for the inspection of either random or repeating patterns | Physics | 150 | Expired |
| US5717518A | Broad spectrum ultraviolet catadioptric imaging system | Physics | 146 | Expired |
| US6288780A | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Physics | 127 | Expired |
| US6433561B1 | Methods and apparatus for optimizing semiconductor inspection tools | Electricity | 118 | Expired |
| US6137570A | System and method for analyzing topological features on a surface | Physics | 96 | Expired |
| US6524873B1 | Continuous movement scans of test structures on semiconductor integrated circuits | Electricity | 93 | Expired |
| US6064517A | High NA system for multiple mode imaging | Physics | 83 | Expired |
| US6078386A | Inspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sources | Physics | 82 | Expired |
| US6445199B1 | Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures | Electricity | 65 | Expired |
| US6021214A | Inspection method and apparatus for the inspection of either random or repeating patterns | Physics | 46 | Expired |
| US7136159B2 | Excimer laser inspection system | Physics | 46 | Expired |
| US6133576A | Broad spectrum ultraviolet inspection methods employing catadioptric imaging | Physics | 39 | Expired |
| US6816249B2 | High throughput brightfield/darkfield wafer inspection system using advanced optical techniques | Physics | 26 | Expired |
| US6665432B1 | Inspection method and apparatus for the inspection of either random or repeating patterns | Physics | 24 | Expired |
| US6867406B1 | Confocal wafer inspection method and apparatus using fly lens arrangement | Physics | 19 | Expired |
| US8879073B2 | Optical metrology using targets with field enhancement elements | Electricity | 19 | Active |
| US6392793B1 | High NA imaging system | Physics | 18 | Expired |
| US6313467A | Broad spectrum ultraviolet inspection methods employing catadioptric imaging | Physics | 16 | Expired |
| US6483638B1 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Physics | 13 | Expired |
| US7109458B2 | Confocal wafer depth scanning inspection method | Physics | 12 | Expired |
| US5956174A | Broad spectrum ultraviolet catadioptric imaging system | Physics | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.