Pneumatic control system and method for shaping deformable mirrors in lithographic projection systems
US6398373B1 · kind B1 · utility
19Cited by
13References
13Claims
0Family size
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Key dates
| Filing date | Aug 9, 2000 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Aug 9, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S359/90
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system for adjusting a deformable mirror including a reaction plate, a plurality of pneumatic actuators coupled to the reaction plate, and a plurality of push-pull flexures coupled on a first end to the pneumatic actuators, and coupled on a second end to the non-reflective side the deformable mirror, the plurality of push-pull flexures being disposed at various locations on the back of the deformable mirror. The respective pairs of push-pull flexures and pneumatic actuators are operated to support and alter the shape of the deformable mirror to allow for correction of a plurality of optical aberrations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.