Contact structure formed over a groove
US6399900B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 30, 1999 |
| Grant date | Jun 4, 2002 |
| Priority date | — |
| Expiry date | Apr 30, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06711
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A contact structure for achieving an electrical connection with a contact target is formed by producing a contactor on a planar surface of a substrate by a microfabrication technology. The contact structure is comprised of a substrate having a planar surface, a groove formed on the substrate lower than the planar surface, and a contactor formed on the substrate. The contactor includes a horizontal portion which is a substantially straight beam with a fixed and a free end, and a contact portion mounted on the free end of the horizontal portion in a direction perpendicular to the horizontal portion. The fixed end is connected to the substrate and the free end is positioned over the groove on the substrate. The groove provides a free space for the contactor when it is pressed against the contact target such that the free end of the horizonal beam enters the groove.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.