Thermal processing apparatus having a coolant passage
US6403926B2 · kind B2 · utility
3Cited by
2References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 7, 2001 |
| Grant date | Jun 11, 2002 |
| Priority date | — |
| Expiry date | May 7, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A thermal processing apparatus includes a cooling water passage in a circumferential wall of a processing vessel such that the cooling water passage extends from a water inlet port to a turn-around point along the circumferential wall in a first direction and further from the turn-around point to a water exit port in a second, opposite direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.