Inventor · Sagamihara, JP

Yicheng Li

20Patents
9h-index
39Co-inventors
75Inventor score

Filing activity: Apr 3, 2001 → Nov 15, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US7740705B2 Exhaust apparatus configured to reduce particle contamination in a deposition system Chemistry; Metallurgy 536 Active
USD593969S1 Processing chamber for manufacturing semiconductors General 524 Expired
US7794546B2 Sealing device and method for a processing system Chemistry; Metallurgy 373 Active
US7670432B2 Exhaust system for a vacuum processing system Chemistry; Metallurgy 357 Expired
US8454749B2 Method and system for sealing a first assembly to a second assembly of a processing system Emerging Cross-Sectional Technologies 355 Active
US6437290B1 Heat treatment apparatus having a thin light-transmitting window Chemistry; Metallurgy 25 Expired
US6448536B2 Single-substrate-heat-processing apparatus for semiconductor process Electricity 20 Expired
US6845292B2 Transfer apparatus and method for semiconductor process and semiconductor processing system Emerging Cross-Sectional Technologies 14 Expired
US6891131B2 Thermal processing system Electricity 11 Expired
US6641302B2 Thermal process apparatus for a semiconductor substrate Physics 8 Expired
USD589472S1 Processing chamber for manufacturing semiconductors General 6 Expired
US6889004B2 Thermal processing system and thermal processing method Electricity 5 Expired
US7029505B2 Sheet type heat treating apparatus and method for processing semiconductors Electricity 4 Expired
US6403926B2 Thermal processing apparatus having a coolant passage Chemistry; Metallurgy 3 Expired
US11862016B1 Multi-intelligence federal reinforcement learning-based vehicle-road cooperative control system and method at complex intersection Physics 0 Active
US12032191B2 Display screen cover and display screen Electricity 0 Active
US12247956B1 Rapid dot matrix micro-nano impact indentation testing system Physics 0 Active
US12247957B1 Pin-on-disk type in-situ current-carrying friction testing system Physics 0 Active
US12307789B2 Multi-task joint perception network model and detection method for traffic road surface information Emerging Cross-Sectional Technologies 0 Active
US11410833B2 Lower electrode mechanism and reaction chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.