Probe for scanning probe microscopy and related methods
US6405584B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 5, 1999 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Oct 5, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/878
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope includes a sensor head adjacent a stage for holding a sample, a scanning actuator for positioning the sensor head relative to the sample, and a probe carried by the sensor head. The probe preferably includes a base connected to the sensor head, a shank extending from the base at an angle offset from perpendicular to the base, and a tip connected to a distal end of the shank for contacting the sample. The angle is preferably in a range of 5 to 20°. The tip is preferably laterally offset from the base to permit viewing of the tip without interference from the shank and the base. Thus, the location of the probe tip relative to the sample may be more easily determined.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.