Apparatus and method for reviewing defects on an object
US6407373B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 15, 1999 |
| Grant date | Jun 18, 2002 |
| Priority date | — |
| Expiry date | Jun 15, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/954
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method are disclosed for reviewing defects on an object. The apparatus includes a stage for receiving the object thereon, and both an optical microscope and a scanning electron microscope (SEM). The optical microscope is used to redetect previously mapped defects on the object surface, and includes an illumination source that directs a beam of light toward a selected portion of the object surface. The optical microscope is configured to generate either, or both, bright field and dark field illumination. Once the defect has been redetected, a translation system moves the stage a predetermined displacement such that the defect is positioned for review by the SEM. The apparatus can be configured to automatically focus the defect for viewing by the SEM, and rotate the stage to obtain varying perspectives of the defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.