Low stiffness suspension for a stage
US6408767B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 2000 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Mar 1, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70816
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.