Inventor · Belmont, CA, US

Mike Binnard

13Patents
9h-index
6Co-inventors
54Inventor score

Filing activity: Feb 2, 2000 → Jan 28, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6304320A Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same Electricity 44 Expired
US6885430B2 System and method for resetting a reaction mass assembly of a stage assembly Physics 33 Expired
US6603531B1 Stage assembly including a reaction assembly that is connected by actuators Physics 19 Expired
US6408767B1 Low stiffness suspension for a stage Physics 19 Expired
US6313550A Coil mounting and cooling system for an electric motor Electricity 16 Expired
US6731372B2 Multiple chamber fluid mount Physics 14 Expired
US6593997B1 Stage assembly including a reaction assembly Physics 10 Expired
US6842248B1 System and method for calibrating mirrors of a stage assembly Physics 9 Expired
US6958808B2 System and method for resetting a reaction mass assembly of a stage assembly Physics 9 Expired
US6757053B1 Stage assembly including a reaction mass assembly Physics 8 Expired
US6888620B2 System and method for holding a device with minimal deformation Physics 5 Expired
US7221433B2 Stage assembly including a reaction assembly having a connector assembly Physics 5 Expired
US6882126B2 Holder mover for a stage assembly Performing Operations; Transporting 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.