Mike Binnard
13Patents
9h-index
6Co-inventors
54Inventor score
Filing activity: Feb 2, 2000 → Jan 28, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6304320A | Stage device and a method of manufacturing same, a position controlling method, an exposure device and a method of manufacturing same, and a device and a method of manufacturing same | Electricity | 44 | Expired |
| US6885430B2 | System and method for resetting a reaction mass assembly of a stage assembly | Physics | 33 | Expired |
| US6603531B1 | Stage assembly including a reaction assembly that is connected by actuators | Physics | 19 | Expired |
| US6408767B1 | Low stiffness suspension for a stage | Physics | 19 | Expired |
| US6313550A | Coil mounting and cooling system for an electric motor | Electricity | 16 | Expired |
| US6731372B2 | Multiple chamber fluid mount | Physics | 14 | Expired |
| US6593997B1 | Stage assembly including a reaction assembly | Physics | 10 | Expired |
| US6842248B1 | System and method for calibrating mirrors of a stage assembly | Physics | 9 | Expired |
| US6958808B2 | System and method for resetting a reaction mass assembly of a stage assembly | Physics | 9 | Expired |
| US6757053B1 | Stage assembly including a reaction mass assembly | Physics | 8 | Expired |
| US6888620B2 | System and method for holding a device with minimal deformation | Physics | 5 | Expired |
| US7221433B2 | Stage assembly including a reaction assembly having a connector assembly | Physics | 5 | Expired |
| US6882126B2 | Holder mover for a stage assembly | Performing Operations; Transporting | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.