End effector for wafer handler in processing system
US6409453B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2000 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Jun 6, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A vacuum processing system has one or more wafer handler with an end effector that, starting at its fixed end, tapers inwardly to form side recesses on opposing sides of the end effector and then tapers outwardly to a free end that is wider than the fixed end. At its free end, the end effector has another recess defining a pair of fingers with wafer supports thereon. The free end recess extends into the wafer sense cutout area. The pair of fingers providing the wafer supports at the free end of the end effector are spaced wider than the innermost exclusion zones for a standard 300 mm wafer carrier, but closer together than the outermost exclusion zones. In one embodiment, the end effector has a three-point ball, or bump, support for the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.