Dan Marohl
45Patents
16h-index
72Co-inventors
84Inventor score
Filing activity: Aug 27, 1992 → May 30, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6258220A | Electro-chemical deposition system | Electricity | 333 | Expired |
| US5746460A | End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | Emerging Cross-Sectional Technologies | 129 | Expired |
| US5860640A | Semiconductor wafer alignment member and clamp ring | Emerging Cross-Sectional Technologies | 74 | Expired |
| US5833426A | Magnetically coupled wafer extraction platform | Emerging Cross-Sectional Technologies | 51 | Expired |
| US6409453B1 | End effector for wafer handler in processing system | Emerging Cross-Sectional Technologies | 49 | Expired |
| US6113698A | Degassing method and apparatus | Electricity | 37 | Expired |
| US5401319A | Lid and door for a vacuum chamber and pretreatment therefor | Emerging Cross-Sectional Technologies | 37 | Expired |
| US5762748A | Lid and door for a vacuum chamber and pretreatment therefor | Emerging Cross-Sectional Technologies | 34 | Expired |
| US5964561A | Compact apparatus and method for storing and loading semiconductor wafer carriers | Emerging Cross-Sectional Technologies | 29 | Expired |
| US5725718A | Clamp ring for domed heated pedestal in wafer processing chamber | Electricity | 25 | Expired |
| US6034863A | Apparatus for retaining a workpiece in a process chamber within a semiconductor wafer processing system | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6267423A | End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5697427A | Apparatus and method for cooling a substrate | Electricity | 19 | Expired |
| US6635157B2 | Electro-chemical deposition system | Electricity | 17 | Expired |
| US6263587A | Degassing method using simultaneous dry gas flux pressure and vacuum | Electricity | 17 | Expired |
| US6503131B1 | Integrated platen assembly for a chemical mechanical planarization system | Performing Operations; Transporting | 16 | Expired |
| US7094139B2 | Retaining ring with flange for chemical mechanical polishing | Electricity | 14 | Expired |
| US5565058A | Lid and door for a vacuum chamber and pretreatment therefor | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6182376A | Degassing method and apparatus | Electricity | 11 | Expired |
| US6568896B2 | Transfer chamber with side wall port | Emerging Cross-Sectional Technologies | 10 | Expired |
| US8322045B2 | Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife | Electricity | 9 | Active |
| US7677958B2 | Retaining ring with flange for chemical mechanical polishing | Electricity | 8 | Active |
| US5929373A | High voltage feed through | Electricity | 7 | Expired |
| US7377002B2 | Scrubber box | Performing Operations; Transporting | 7 | Expired |
| US10109460B2 | Universal non-invasive chamber impedance measurement system and associated methods | Electricity | 7 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.