Apparatus, system, and method for active compensation of aberrations in an optical system
US6411426B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 1, 2000 |
| Grant date | Jun 25, 2002 |
| Priority date | — |
| Expiry date | Nov 30, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70258
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Active compensation of aberrations in an optical system involves attaching first and second force bars to a mirror. The first force bar is bifurcated to form an opening near its longitudinal midpoint. This opening defines first and second opposed surfaces. A second force bar is substantially perpendicular to the first force bar and extends through the opening of the first force bar so that a medial portion of the second force bar is disposed in the opening of the first force bar. The second force bar is connected to the first surface by at least one actuator. Longitudinal movement of the actuator causes a displacement of the mirror. A support structure is used to support the weight of the force bars and actuator. The force bars are connected to the support structure by a plurality of flexures. A control module receives information from a sensing module and controls the actuator. Other embodiments use more than two force bars and are capable of more fully compensating for any aberrations in the optical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.