Step difference detection apparatus and processing apparatus using the same
US6421451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 11, 1998 |
| Grant date | Jul 16, 2002 |
| Priority date | — |
| Expiry date | Sep 11, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V10/145
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
The present invention provides a step difference detection apparatus including an illumination section for emitting illumination light, an incident section for making the illumination light emitted by the illumination section be incident on a plurality of small illumination regions on an object carried in a predetermined carrier direction from different directions, an image sensing section for inputting an image of the regions on the object illuminated with the illumination light which is made to be incident by the incident section, and a detection section for detecting a step difference on the object on the basis of the image sensed by the image sensing section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.