Process solution supplying apparatus and fluid passageway opening-closing valve device for process solution supplying apparatus
US6427717B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 28, 1999 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Jun 28, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/6579
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A process solution supplying apparatus for supplying a process solution onto a substrate to be processed, comprising a process solution supply source, a process solution supply tube having its upstream end connected to the process solution supply source and serving to discharge the process solution from the downstream end thereof onto the substrate, a fluid passageway opening-closing valve device mounted on a downstream side of the process solution supply tube for opening-closing the process solution supply tube, and a temperature adjusting solution tube, through which flows a temperature adjusting solution, arranged continuously through the fluid passageway opening-closing valve device in a downstream portion of the process solution supply tube including the fluid passageway opening-closing valve device for adjusting the temperature of the process solution within the process solution supply tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.