Recipe management database system
US6430572B1 · kind B1 · utility
17Cited by
7References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1999 |
| Grant date | Aug 6, 2002 |
| Priority date | — |
| Expiry date | Mar 8, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S707/99948
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A scan tool recipe management database system for recipes utilized in the scanning of semiconductor wafers during the manufacture of the semiconductor wafers. The scan tool recipe management database system includes workstations at each scan tool for simultaneously inputting recipes and changes to the recipes to the scan tool and to a scan tool recipe database.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.