Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same
US6445006B1 · kind B1 · utility
295Cited by
8References
55Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 27, 1999 |
| Grant date | Sep 3, 2002 |
| Priority date | — |
| Expiry date | Jul 27, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/776
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microelectronic or microelectromechanical device, including a substrate and a carbon microfiber formed thereon, which may be employed as an electrical connector for the device or as a selectively translational component of a microelectromechanical (MEMS) device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.